Low Pressure Medium Flow Pneumatic Diaphragm Valves

Low Pressure Medium Flow Type Pneumatic Diaphragm Valves

All Diaphragm Valves are ultrasonic cleaned and Helium Leak Tested before packaging and delivery. The inboard leak rate, outboard leak rate and seat leak rate are beyond the standard specified in SEMI-F1. Helium Leak Rate: Inboard ≤5×10^-10std cm³/s, Outboard ≤5×10^-10std cm³/s, Seat ≤1×10^-9std cm³/s. Variety of end connection types available: male MR fitting, female MR fitting, (swivel) rotatable male MR fitting, tube butt weld, fractional tube fitting, metric tube fitting.

Three options of cleaning: Standard Ra 15 µin (0.4 µm), high purity Ra 10 µin (0.25 µm) and ultra-high purity Ra 5 µin (0.13 µm)

Packaging: Double bagged with inner bag filled with 99.999% nitrogen

Marking: Permanently heat code marked; traceable to original mill certificate of test

Inspection: Critical surfaces are 100% visually inspected using magnification and lighting

Testing: All valves 100% helium leakage tested before delivery. All products come with high-quality appearance