Low Pressure Manual Diaphragm Valves

Main Technical Data:

Diaphragm Valves are ultrasonic cleaned and Helium Leak Tested before packaging and delivery. The inboard leak rate, outboard leak rate and seat leak rate are beyond the standard specified in SEMI-F1. Helium Leak Rate: Inboard ≤5×10^-10std cm³/s, Outboard ≤5×10^-10std cm³/s, Seat ≤1×10^-9std cm³/s. Variety of end connection types available: male MR fitting, female MR fitting, (swivel) rotatable male MR fitting, tube butt weld, fractional tube fitting, metric tube fitting.