High Purity Diaphragm Regulators
-
High Performance High Purity Regulators
▪ End Connection Size 1/4″, 3/8″ or 1/2″
▪ 2 ports, 3 ports and 4 ports configuration for option
▪ Max. Working Pressure: 6000 psig（414 bar)
▪ Outlet Pressure Range: 0~30, 0~60, 0~100, 0 ~150 psig
▪ Flow Coefficient (Cv): 0.06~4.50
▪ Leak Rate (Helium): internal ≤5×10^-8std cm³/s, external ≤1×10^-9std cm³/s
▪ 316L stainless steel body for corrosive gases and toxic gases
▪ Metal to metal diaphragm to body seal
▪ 316L VIM-VAR stainless steel body for ultrahigh-purity applications
