Gas Systems
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IGS Integrated Gas Systems
▪ Integrated Gas System is used to control gas in the semiconductor industry, integrating valves, fittings, and other piping components, as well as other necessary measuring and control instruments. Our Integrated Gas System uses SEMI compliant surface-mounted components and is modularly designed. While reducing the size of the device, installation and maintenance become easier.
▪ The size is about 1/3 the traditional panel, and the corresponding flow path size is also reduced for better contamination control
▪ Every sealing face has a leak detection hole
▪ IGS uses silver-plated bolts to prevent galling
▪ Bolts with Falling Prevention Design
▪ Tolerance Compensation Structure (W-Seal Only)
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High Purity Gas Stick Assemblies
▪ Ultra high purity diaphragm valve for shut-off function
▪ With ultra high purity pressure gauge and regulator
▪ Sizes from 1/4″ to 1″ optional
▪ Alloy diaphragm improves strength and corrosion resistance for long cycle life
▪ Tubular fittings optional for pressure gauge connection (customized lengths available)
▪ Ultra High Purity Process Cleaning and Packaging
